Chemical Vapour Deposition An Integrated Engineering Design for Advanced Materials by Yongdong Xu · Xiu-Tian Yan

Table of Contents
Chapter 1
Introduction to Chemical Vapour Deposition
Chapter 2
Physical Fundamentals of Chemical Vapour Deposition
Chapter 3
Chemical Vapour Deposition Systems Design
Chapter 4
Thermodynamics and Kinetics of Chemical Vapour Deposition
Chapter 5
Chemical Vapour Infiltration
Chapter 6
Microstructure Evolution and Process Control
Appendix A
Conversion Factors for Pressure Units
Appendix B
Vapour Pressure of Precursors
Appendix C
Chemical Vapour Deposition Materials and Their Corresponding Precursors
Appendix D
Chemical Vapour Deposition Phase Diagram Collection
Appendix E
Acknowledgment of Figures and Tables Adopted from Other Sources